"㈜인포비온"

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

EBA Source

Details

  • 카달로그 다운로드
  • Base System Features Specifications
    EBA Source Type RF EBA Source
    Beam Aperture Ø60, Ø120, Ø150, Ø200
    Beam Energy ~5Kev
    Gas Flow 2~15sccm
    Gas Use Reactive & Inert gas
    Cooling type & Connection Water Cooling, ¼” VCR connection
    Mounting Flange ISO 160 ~ISO 300
    Weight 4~15 Kg