"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공부품 - Ion Beam Source

RF Round Ion Source (INFO-RF60G, INFO-RF120G, INFO-RF150G, INFO-RF200G)

1.Low-maintenance parts

2. Operation with all inert and reactive gases

3. Various size options(⌀60 ~ ⌀240)

4. Effect of pre-cleaning, chemical modification of a surface, reactive etching, oxidizing & nitriding of surface, and deposition of IBD (Ion Beam Deposition) &
IBAD (Ion Beam Assisted Deposition)

  • INFO-RF-60G
  • INFO-RF-120G

Details

  • 카달로그 다운로드
  • Dimension
    A 53
    B 146
    C 298
    D 134
    E 134
    Connetion Type Size
    Water Quick Coupler ⌀ 6
    Gas VCR male ⌀ 1/4"
    Type Input Qutput
    DC Power
    Generator    		 Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator    		 Plasma
    Ignition    		 Single Phase 220V 0 ~ 600W

Detail

  • Dimension
    A 129
    B 212
    C 226
    D 134
    E 172
    Connetion Type Size
    Water Quick Coupler ⌀ 6
    Gas VCR male ⌀ 1/4"
    Type Input Qutput
    DC Power
    Generator    		 Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator    		 Plasma
    Ignition    		 Single Phase 220V 0 ~ 1kW